Product: Nanopatterned Silicon Stamps

LightSmyth offers a large variety of nanomachined single crystal silicon substrates providing a low-cost entry into nanophotonics research for industry and academic institutions. The substrates may be used in a variety of applications in optics, photonics, biology, chemistry, physics (e.g. neutron scattering), polymer research, nanoimprinting, microfluidics and others. If desired, the substrates can be coated with metallic or dielectric coating. Most of the surface features have slightly trapezoidal cross-section profiles with straight parallel mesas and trenches. Lattice-like structures are available as well. A number of feature sizes and trench depth is available. SEM images of the substrates may be taken prior to shipment to verify the exact profile.

Dimensions shown in the table represent target value. Period has accuracy better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. SEM are given for illustration purposes. If more precise dimensional information is required, LightSmyth may provide an SEM of the specific piece of nanostamp you order as an optional service.

Specification

Description Value
Substrate Width and Height Tolerance standard tolerance ± 0.2 mm
Clear Aperture (CA) 0.5 mm from substrate edge (the pattern may extend to the edge of the substrate)
Substrate Thickness 0.675 ± 0.050 mm
Surface Quality in CA P/N ends with “-P”: 60/40 scratch/dig: 0.06 mm maximum scratch width, 0.4 mm maximum dig diameter. up to 20/10 specification may be provided at a premium
Surface Quality in CA P/N ends with “-S”: Discounted grade due to surface quality. Has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present
Surface Quality outside of CA no requirements
Material Single crystal silicon, reactive ion etch

Linear Nanostamps (line+space) Buy Now

Part
Number
Period (nm) Groove
Depth (nm)
Duty Cycle1 Line
Width2 (nm)
Size 3
(mm)
Price SEM link1 SEM link2
SNS-C72-1212-50-P 139 50 50% 69.5 12.5×12.5×0.7 $290.00 ea. X-sec Top down Buy Now
SNS-C72-2525-50-P 139 50 50% 69.5 25×25×0.7 5 $470.00 ea. X-sec Top down Buy Now
SNS-C36-1212-110-S 4 278 110 50% 139 12.5×12.5×0.7 $95.00 ea. X-sec Top down Buy Now
SNS-C24-1212-110-P 416.6 110 50% 208 12.5×12.5×0.7 $185.00 ea. X-sec Top down Buy Now
SNS-C20-0808-150-D45-P 500 150 44% 220 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C20-0808-350-D45-P 500 350 44% 220 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C20-0808-150-D60-P 500 150 60% 300 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C20-0808-350-D60-P 500 350 60% 300 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C18-2009-110-D50-P 555.5 110 50% 278 20×9×0.7 $185.00 ea. X-sec Top down Buy Now
SNS-C18-2009-140-D50-P 555.5 140 50% 278 20×9×0.7 $185.00 ea. X-sec Top down Buy Now
SNS-C18-2009-110-D29-P 555.5 110 29% 158 20×9×0.7 $185.00 ea. X-sec Top down Buy Now
SNS-C18-2009-140-D29-P 555.5 140 29% 158 20×9×0.7 $185.00 ea. X-sec Top down Buy Now
SNS-C16.7-0808-150-D45-P 600 150 43% 260 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C16.7-0808-350-D45-P 600 350 43% 260 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C16.7-0808-150-D55-P 600 150 55% 330 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C16.7-0808-350-D55-P 600 350 55% 330 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C16.5-2912-190-P 606 190 50% 303 29×12×0.7 $245.00 ea. X-sec Top down Buy Now
SNS-C16.5-2912-190-S 4 606 190 50% 303 29×12×0.7 $90.00 ea. X-sec Top down Buy Now
SNS-C16.5-2924-190-P 606 190 50% 303 29×24.2×0.7 5 $380.00 ea. X-sec Top down Buy Now
SNS-C14.8-2410-170-P 675 170 32% 218 24×10×0.7 $245.00 ea. Buy Now
SNS-C14.8-2430-170-P 675 170 32% 218 24×30.4×0.7 5 $380.00 ea. Buy Now
SNS-C14.3-0808-150-D45-P 700 150 47% 330 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C14.3-0808-350-D45-P 700 350 47% 330 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C14.3-0808-150-D55-P 700 150 55% 375 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C14.3-0808-150-D55-P 700 150 55% 375 8×8.3×0.7 $185.00 ea. Top down Buy Now
SNS-C12-1212-200-P 833.3 200 50% 416 12.5×12.5×0.7 $185.00 ea. X-sec Top down Buy Now
SNS-C12-2525-200-P 833.3 200 50% 416 25×25×0.7 5 $380.00 ea. X-sec Top down Buy Now
SNS-C11.7-1212-200-P 855 200 50% 428 12.5×12.5×0.7 $185.00 ea. Buy Now
SNS-C11.7-2525-200-P 855 200 50% 428 25×25×0.7 5 $380.00 ea. Buy Now
1 Duty cycle denotes ratio of line (mesa) width over period.
2 Indicates width value of mesa.
3 Second dimension corresponds to the groove length.
4 P/N ending with “-S” is “scientific” grade offered at a discount. It has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present.
5 Larger custom sizes available-please call

2D nanostamps (rectangular and hexagonal lattice) Buy Now

Part
Number
Period
(nm)
Lattice type Groove depth Feature
Width
(nm)
Size
(mm)
Price SEM link1
S2D-24B2-0808-150-P 600 rect post 150 195 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24B2-0808-350-P 600 rect post 350 195 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18B2-0808-150-P 600 rect post 150 275 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18B2-0808-350-P 600 rect post 350 275 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24B3-0808-150-P 700 rect post 150 260 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24B3-0808-350-P 700 rect post 350 260 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18B3-0808-150-P 700 rect post 150 350 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18B3-0808-350-P 700 rect post 350 350 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24C2-0808-150-P 600 hex post 150 165 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24C2-0808-350-P 600 hex post 350 165 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18C2-0808-150-P 600 hex post 150 240 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18C2-0808-350-P 600 hex post 350 240 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24C3-0808-150-P 700 hex post 150 220 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24C3-0808-350-P 700 hex post 350 220 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18C3-0808-150-P 700 hex post 150 290 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18C3-0808-350-P 700 hex post 350 290 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24D2-0808-150-P 600 hex hole 150 180 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24D2-0808-350-P 600 hex hole 350 180 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18D3-0808-150-P 700 hex hole 150 200 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-18D3-0808-350-P 700 hex hole 350 200 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24D3-0808-150-P 700 hex hole 150 290 8×8.3×0.7 $185.00 ea. Top down Buy Now
S2D-24D3-0808-350-P 700 hex hole 350 290 8×8.3×0.7 $185.00 ea. Top down Buy Now

New nanostamps are added to our stock frequently. Please contact our application scientists if you cannot find a nanostructure you need in our stock list.

*New* Custom deeper groove depth on all stock stamps available. Please contact LightSmyth Technologies at +1-541-431-0026 or info@lightsmyth.com to request a quotation or for additional technical information.