LightSmyth Technologies - Crafting Light for Industry and Science

Products:

Nanopatterned Silicon Stamps

LightSmyth offers a large variety of nanomachined single crystal silicon substrates providing a low-cost entry into nanophotonics research for industry and academic institutions. The substrates may be used in a variety of applications in optics, photonics, biology, chemistry, physics (e.g. neutron scattering), polymer research, nanoimprinting, microfluidics and others. If desired, the substrates can be coated with metallic or dielectric coating. Most of the surface features have slightly trapezoidal cross-section profiles with straight parallel mesas and trenches. Lattice-like structures are available as well. A number of feature sizes and trench depth is available. SEM images of the substrates may be taken prior to shipment to verify the exact profile.

New nanostamps are added to our stock frequently. Please contact our application scientists if you cannot find a nanostructure you need in our stock list.  

Ordering notes: Prices are subject to change without notice. The total order price will include handling and shipping charges. For orders with the total product value below $250.00, a handling fee of $75.00 will be added, otherwise the handling fee is $5.00. For shipping options and pricing, refer to the order form.

Dimensions shown in the table represent target value. Period has accuracy better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. SEM are given for illustration purposes. If more precise dimensional information is required, LightSmyth may provide an SEM of the specific piece of nanostamp you order as an optional service.

Volume discounts:

15% off the orders with exceeding $1000, 20% off the orders exceeding $2000 (excluding shipping and handling).

New:

Custom deeper groove depth on all stock stamps available. Contact us for details.

Specification

Description Value
Substrate Width and Height Tolerance standard tolerance ± 0.2 mm
Clear Aperture (CA) 0.5 mm from substrate edge (the pattern may extend to the edge of the substrate)
Substrate Thickness 0.675 ± 0.050 mm
Surface Quality in CA P/N ends with "-P": 60/40 scratch/dig: 0.06 mm maximum scratch width, 0.4 mm maximum dig diameter. up to 20/10 specification may be provided at a premium
Surface Quality in CA P/N ends with "-S": Discounted grade due to surface quality. Has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present
Surface Quality outside of CA no requirements
Material Single crystal silicon, reactive ion etch

Linear Nanostamps (line+space)

Period Groove depth Duty cycle 1 Line width 2 Size 3 Part number Price SEM link1 SEM link2
139 nm 50 nm 50% 69.5 nm 12.5×12.5×0.7 mm SNS-C72-1212-50-P $290.00 ea. X-sec Top down
139 nm 50 nm 50% 69.5 nm 25×25×0.7 mm 5 SNS-C72-2525-50-P $470.00 ea. X-sec Top down
278 nm 110 nm 50% 139 nm 12.5×12.5×0.7 mm SNS-C36-1212-110-S 4 $95.00 ea. X-sec Top down
416.6 nm 110 nm 50% 208 nm 12.5×12.5×0.7 mm SNS-C24-1212-110-P $185.00 ea. X-sec Top down
500 nm multiple 6 44% 220 nm 8×8.3×0.7 mm SNS-C20-0808-xxx-D45-P $185.00 ea. Top down
500 nm multiple 6 60% 300 nm 8×8.3×0.7 mm SNS-C20-0808-xxx-D60-P $185.00 ea. Top down
555.5 nm 110 nm 50% 278 nm 20×9×0.7 mm SNS-C18-2009-110-D50-P $185.00 ea. X-sec Top down
555.5 nm 140 nm 50% 278 nm 20×9×0.7 mm SNS-C18-2009-140-D50-P $185.00 ea. X-sec Top down
555.5 nm 110 nm 29% 158 nm 20×9×0.7 mm SNS-C18-2009-110-D29-P $185.00 ea. X-sec Top down
555.5 nm 140 nm 29% 158 nm 20×9×0.7 mm SNS-C18-2009-140-D29-P $185.00 ea. X-sec Top down
600 nm multiple 6 43% 260 nm 8×8.3×0.7 mm SNS-C16.7-0808-xxx-D45-P $185.00 ea. Top down
600 nm multiple 6 55% 330 nm 8×8.3×0.7 mm SNS-C16.7-0808-xxx-D55-P $185.00 ea. Top down
606 nm 190 nm 50% 303 nm 29×12×0.7 mm SNS-C16.5-2912-190-P $245.00 ea. X-sec Top down
606 nm 190 nm 50% 303 nm 29×12×0.7 mm SNS-C16.5-2912-190-S 4 $90.00 ea. X-sec Top down
606 nm 190 nm 50% 303 nm 29×24.2×0.7 mm 5 SNS-C16.5-2924-190-P $380.00 ea. X-sec Top down
675 nm 170 nm 32% 218 nm 24×10×0.7 mm SNS-C14.8-2410-170-P $245.00 ea.
675 nm 170 nm 32% 218 nm 24×30.4×0.7 mm 5 SNS-C14.8-2430-170-P $380.00 ea.
700 nm multiple 6 47% 330 nm 8×8.3×0.7 mm SNS-C14.3-0808-xxx-D45-P $185.00 ea. Top down
700 nm multiple 6 55% 375 nm 8×8.3×0.7 mm SNS-C14.3-0808-xxx-D55-P $185.00 ea. Top down
833.3 nm 200 nm 50% 416 nm 12.5×12.5×0.7 mm SNS-C12-1212-200-P $185.00 ea. X-sec Top down
833.3 nm 200 nm 50% 416 nm 25×25×0.7 mm 5 SNS-C12-2525-200-P $380.00 ea. X-sec Top down
1 Duty cycle denotes ratio of line (mesa) width over period.
2 Indicates width value of mesa.
3 Second dimension corresponds to the groove length.
4 P/N ending with "-S" is "scientific" grade offered at a discount. It has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present. 
5 Larger custom sizes available-please call
6 Depth options of 150, 250 and 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively.

2D nanostamps (rectangular and hexagonal lattice)

Period Lattice type Groove depth Feature width Size Part number Price SEM link1 SEM link2
500 nm rect post multiple 1 135 nm 8×8.3×0.7 mm S2D-24B1-0808-xxx-P $185.00 ea. Top down
500 nm rect post multiple 1 210 nm 8×8.3×0.7mm S2D-18B1-0808-xxx-P $185.00 ea. Top down
600 nm rect post multiple 1 195 nm 8×8.3×0.7mm S2D-24B2-0808-xxx-P $185.00 ea. Top down
600 nm rect post multiple 1 275 nm 8×8.3×0.7mm S2D-18B2-0808-xxx-P $185.00 ea. Top down
700 nm rect post multiple 1 260 nm 8×8.3×0.7mm S2D-24B3-0808-xxx-P $185.00 ea. Top down
700 nm rect post multiple 1 350 nm 8×8.3×0.7mm S2D-18B3-0808-xxx-P $185.00 ea. Top down
500 nm hex post multiple 1 165 nm 8×8.3×0.7mm S2D-18C1-0808-xxx-P $185.00 ea. Top down
600 nm hex post multiple 1 165 nm 8×8.3×0.7mm S2D-24C2-0808-xxx-P $185.00 ea. Top down
600 nm hex post multiple 1 240 nm 8×8.3×0.7mm S2D-18C2-0808-xxx-P $185.00 ea. Top down
700 nm hex post multiple 1 220 nm 8×8.3×0.7mm S2D-24C3-0808-xxx-P $185.00 ea. Top down
700 nm hex post multiple 1 290 nm 8×8.3×0.7mm S2D-18C3-0808-xxx-P $185.00 ea. Top down
600 nm hex hole multiple 1 180 nm 8×8.3×0.7mm S2D-24D2-0808-xxx-P $185.00 ea. Top down
700 nm hex hole multiple 1 200 nm 8×8.3×0.7mm S2D-18D3-0808-xxx-P $185.00 ea. Top down
700 nm hex hole multiple 1 290 nm 8×8.3×0.7mm S2D-24D3-0808-xxx-P $185.00 ea. Top down
1 Depth options of 150, 250 and limited selection of 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively.