Products:

Nanopatterned Silicon Stamps

LightSmyth offers a large variety of nanomachined single crystal silicon substrates providing a low-cost entry into nanophotonics research for industry and academic institutions. The substrates may be used in a variety of applications in optics, photonics, biology, chemistry, physics (e.g. neutron scattering), polymer research, nanoimprinting, microfluidics and others. If desired, the substrates can be coated with metallic or dielectric coating. Most of the surface features have slightly trapezoidal cross-section profiles with straight parallel mesas and trenches. Lattice-like structures are available as well. A number of feature sizes and trench depth is available. SEM images of the substrates may be taken prior to shipment to verify the exact profile.

New nanostamps are added to our stock frequently. Please contact our application scientists if you cannot find a nanostructure you need in our stock list.

Ordering notes: Prices are subject to change without notice. The total order price will include handling and shipping charges. For orders with the total product value below $250.00, a handling fee of $75.00 will be added, otherwise the handling fee is $5.00. For shipping options and pricing, refer to the order form.

Dimensions shown in the table represent target value. Period has accuracy better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. SEM are given for illustration purposes. If more precise dimensional information is required, LightSmyth may provide an SEM of the specific piece of nanostamp you order as an optional service.

Volume discounts:

15% off the orders with exceeding $1000, 20% off the orders exceeding $2000 (excluding shipping and handling).

New:

Custom deeper groove depth on all stock stamps available. Contact us for details.

Specification

Description	Value
Substrate Width and Height Tolerance	standard tolerance ± 0.2 mm
Clear Aperture (CA)	0.5 mm from substrate edge (the pattern may extend to the edge of the substrate)
Substrate Thickness	0.675 ± 0.050 mm
Surface Quality in CA	P/N ends with "-P": 60/40 scratch/dig: 0.06 mm maximum scratch width, 0.4 mm maximum dig diameter. up to 20/10 specification may be provided at a premium
Surface Quality in CA	P/N ends with "-S": Discounted grade due to surface quality. Has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present
Surface Quality outside of CA	no requirements
Material	Single crystal silicon, reactive ion etch

Linear Nanostamps (line+space)

Period	Groove depth	Duty cycle ¹	Line width ²	Size ³	Part number	Price	SEM link1	SEM link2
139 nm	50 nm	50%	69.5 nm	12.5×12.5×0.7 mm	SNS-C72-1212-50-P	$290.00 ea.	X-sec	Top down
139 nm	50 nm	50%	69.5 nm	25×25×0.7 mm⁵	SNS-C72-2525-50-P	$470.00 ea.	X-sec	Top down
278 nm	110 nm	50%	139 nm	12.5×12.5×0.7 mm	SNS-C36-1212-110-S ⁴	$95.00 ea.	X-sec	Top down
416.6 nm	110 nm	50%	208 nm	12.5×12.5×0.7 mm	SNS-C24-1212-110-P	$185.00 ea.	X-sec	Top down
500 nm	multiple ⁶	44%	220 nm	8×8.3×0.7 mm	SNS-C20-0808-xxx-D45-P	$185.00 ea.		Top down
500 nm	multiple⁶	60%	300 nm	8×8.3×0.7 mm	SNS-C20-0808-xxx-D60-P	$185.00 ea.		Top down
555.5 nm	110 nm	50%	278 nm	20×9×0.7 mm	SNS-C18-2009-110-D50-P	$185.00 ea.	X-sec	Top down
555.5 nm	140 nm	50%	278 nm	20×9×0.7 mm	SNS-C18-2009-140-D50-P	$185.00 ea.	X-sec	Top down
555.5 nm	110 nm	29%	158 nm	20×9×0.7 mm	SNS-C18-2009-110-D29-P	$185.00 ea.	X-sec	Top down
555.5 nm	140 nm	29%	158 nm	20×9×0.7 mm	SNS-C18-2009-140-D29-P	$185.00 ea.	X-sec	Top down
600 nm	multiple ⁶	43%	260 nm	8×8.3×0.7 mm	SNS-C16.7-0808-xxx-D45-P	$185.00 ea.		Top down
600 nm	multiple⁶	55%	330 nm	8×8.3×0.7 mm	SNS-C16.7-0808-xxx-D55-P	$185.00 ea.		Top down
606 nm	190 nm	50%	303 nm	29×12×0.7 mm	SNS-C16.5-2912-190-P	$245.00 ea.	X-sec	Top down
606 nm	190 nm	50%	303 nm	29×12×0.7 mm	SNS-C16.5-2912-190-S ⁴	$90.00 ea.	X-sec	Top down
606 nm	190 nm	50%	303 nm	29×24.2×0.7 mm⁵	SNS-C16.5-2924-190-P	$380.00 ea.	X-sec	Top down
675 nm	170 nm	32%	218 nm	24×10×0.7 mm	SNS-C14.8-2410-170-P	$245.00 ea.
675 nm	170 nm	32%	218 nm	24×30.4×0.7 mm ⁵	SNS-C14.8-2430-170-P	$380.00 ea.
700 nm	multiple ⁶	47%	330 nm	8×8.3×0.7 mm	SNS-C14.3-0808-xxx-D45-P	$185.00 ea.		Top down
700 nm	multiple⁶	55%	375 nm	8×8.3×0.7 mm	SNS-C14.3-0808-xxx-D55-P	$185.00 ea.		Top down
833.3 nm	200 nm	50%	416 nm	12.5×12.5×0.7 mm	SNS-C12-1212-200-P	$185.00 ea.	X-sec	Top down
833.3 nm	200 nm	50%	416 nm	25×25×0.7 mm⁵	SNS-C12-2525-200-P	$380.00 ea.	X-sec	Top down
¹ Duty cycle denotes ratio of line (mesa) width over period.
² Indicates width value of mesa.
³ Second dimension corresponds to the groove length.
⁴ P/N ending with "-S" is "scientific" grade offered at a discount. It has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present.
⁵ Larger custom sizes available-please call
⁶ Depth options of 150, 250 and 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively.

2D nanostamps (rectangular and hexagonal lattice)

Period	Lattice type	Groove depth	Feature width	Size	Part number	Price	SEM link1
500 nm	rect post	multiple¹	135 nm	8×8.3×0.7 mm	S2D-24B1-0808-xxx-P	$185.00 ea.	Top down
500 nm	rect post	multiple¹	210 nm	8×8.3×0.7mm	S2D-18B1-0808-xxx-P	$185.00 ea.	Top down
600 nm	rect post	multiple¹	195 nm	8×8.3×0.7mm	S2D-24B2-0808-xxx-P	$185.00 ea.	Top down
600 nm	rect post	multiple¹	275 nm	8×8.3×0.7mm	S2D-18B2-0808-xxx-P	$185.00 ea.	Top down
700 nm	rect post	multiple¹	260 nm	8×8.3×0.7mm	S2D-24B3-0808-xxx-P	$185.00 ea.	Top down
700 nm	rect post	multiple¹	350 nm	8×8.3×0.7mm	S2D-18B3-0808-xxx-P	$185.00 ea.	Top down
500 nm	hex post	multiple¹	165 nm	8×8.3×0.7mm	S2D-18C1-0808-xxx-P	$185.00 ea.	Top down
600 nm	hex post	multiple¹	165 nm	8×8.3×0.7mm	S2D-24C2-0808-xxx-P	$185.00 ea.	Top down
600 nm	hex post	multiple¹	240 nm	8×8.3×0.7mm	S2D-18C2-0808-xxx-P	$185.00 ea.	Top down
700 nm	hex post	multiple¹	220 nm	8×8.3×0.7mm	S2D-24C3-0808-xxx-P	$185.00 ea.	Top down
700 nm	hex post	multiple¹	290 nm	8×8.3×0.7mm	S2D-18C3-0808-xxx-P	$185.00 ea.	Top down
600 nm	hex hole	multiple¹	180 nm	8×8.3×0.7mm	S2D-24D2-0808-xxx-P	$185.00 ea.	Top down
700 nm	hex hole	multiple¹	200 nm	8×8.3×0.7mm	S2D-18D3-0808-xxx-P	$185.00 ea.	Top down
700 nm	hex hole	multiple¹	290 nm	8×8.3×0.7mm	S2D-24D3-0808-xxx-P	$185.00 ea.	Top down
¹ Depth options of 150, 250 and limited selection of 350 nm available. To order a particular depth, replace "xxx" in the part number with "150", "250", or "350", respectively.

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